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Lithography

Main Index > Lithography

Content  


Semiconductor Industry - Overview

Semiconductor Materials

Crystal Growth and Wafer Preparation

Contamination Control

Wafer Fabrication - Overview

Process Yields

Epitaxy

Oxidation

Lithography

Reactive Plasma Etching

Film Deposition

Ion Implantation

Metallization

Wafer Test and Evaluation

Assembly and Packaging

Appendix



Semiconductor News
 


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  •  Links  

    10 Process Steps for Photolithography explained together with a short movie
    Britney Spears guide to Semiconductor Physics photolithography
    Electron Beam Lithography (EBL)
    Immersion lithography (encyclopedia article about Immersion lithography)
    Lithography
    Optical Lithography
    Photolithography (www.ece.gatech.edu)
    Photolithography - encyclopedia article about photolithography.
    Photolithography by Micron
    photolithography Definition and Much More From Answers.com
    Photolithography I (www.engr.sjsu.edu) [PDF]
    Photolithography II (www.engr.sjsu.edu) [PDF]
    Photolithography in Microengineering by D. Banks
    Photolithography [PDF]
    Picture of reticle or photo mask
    Semiconductor Tour Photolithography Process



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